[1]韩玉蕊,杜安天,顾广瑞*.磁控溅射Ti掺杂NbN薄膜的机械和摩擦学特性研究[J].延边大学学报(自然科学版),2019,(03):208-214.
 HAN Yurui,DU Antian,GU Guangrui*.Study on the mechanical and tribological properties of Ti-doped NbN films deposited by magnetron sputtering[J].Journal of Yanbian University,2019,(03):208-214.
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磁控溅射Ti掺杂NbN薄膜的机械和摩擦学特性研究

参考文献/References:

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备注/Memo

收稿日期: 2019-06-18
基金项目: 国家自然科学基金资助项目(51272224)
*通信作者: 顾广瑞(1970—),男,博士,教授,研究方向为功能材料物理.

更新日期/Last Update: 2019-11-20