[1]刘艳,姜坤,吴宝嘉,等.沉积参数对二氧化钛薄膜结构相变的影响[J].延边大学学报(自然科学版),2014,40(01):34-37.
　LIU Yan,JIANG Kun,WU Baojia,et al.Effects of deposition parameters on structural phase transition of TiO2 films[J].Journal of Yanbian University,2014,40(01):34-37.
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沉积参数对二氧化钛薄膜结构相变的影响

《延边大学学报(自然科学版)》[ISSN:1004-4353/CN:22-1191/N] 卷: 第40卷 期数: 2014年01期 页码: 34-37 栏目: 基础科学研究 出版日期: 2014-03-20
Title:
Effects of deposition parameters on structural phase transition of TiO2 films
作者:
刘艳; 姜坤; 吴宝嘉; 顾广瑞
延边大学理学院 物理系, 吉林 延吉 133002
Author(s):
LIU Yan;  JIANG Kun;  WU Baojia;  GU Guangrui*
Department of Physics, College of Science, Yanbian University, Yanji 133002, China
关键词:
二氧化钛薄膜;  金红石;  锐钛矿;  结构相变
Keywords:
TiO2 films;  rutile;  anatase;  structural phase transition
分类号:
O481.1
文献标志码:
A
摘要:
用磁控溅射的方法在硅衬底上制备了二氧化钛薄膜,并通过改变薄膜沉积过程中氧气含量、溅射时间、工作压强、衬底温度等溅射参数,制备了系列薄膜样品,得到了二氧化钛薄膜两种相结构的最佳生成条件.研究表明:较高的工作压强有利于金红石结构的生成; 衬底加热、增加沉积时间有利于生成锐钛矿结构; 氧气含量的变化对薄膜的相结构没有明显影响.
Abstract:
The TiO2 films were successfully deposited on Si substrates by magnetron sputtering. We obitained the optimum growth condition of rutile and anatase TiO2 films by changing deposition oxygen content, sputtering pressure, sputtering power, sputtering time and substrate temperature. The experimental results show that higher sputtering pressure is good for rutile deposition. Heated substrate and more sputtering time are good for anatase deposition. But the effection of oxygen content on phase structure is not obvious.

参考文献/References:

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备注/Memo

收稿日期: 2013-10-13 基金项目: 国家自然科学基金资助项目(11164031,51272224)*通信作者: 顾广瑞(1970—),男,博士,教授,研究方向为薄膜材料.

更新日期/Last Update: 2014-03-20