WANG Haomin,GUAN Xue,GU Guangrui.Properties of CdS thin films prepared by radiofrequency magnetron sputtering[J].Journal of Yanbian University,2024,(02):31-38.
射频磁控溅射制备CdS薄膜性质研究
- Title:
- Properties of CdS thin films prepared by radiofrequency magnetron sputtering
- 文章编号:
- 1004-4353（2024）02-0031-09
- Keywords:
- CdS thin film; radiofrequency magnetron sputtering; sputtering power; optical properties; electrical properties
- 分类号:
- O484.4
- 文献标志码:
- A
- 摘要:
- 利用射频磁控溅射技术，在玻璃和Si(111)的基板上沉积CdS薄膜，并研究了溅射功率对薄膜的结构、光学和电学特性等影响．X射线衍射结果表明，在不同溅射功率下制备的CdS薄膜样品，均表现为在(002)方向择优生长，其晶粒尺寸和表面粗糙度均随溅射功率的增大而增大．透射光谱分析表明，CdS薄膜在近红外光区域具有较大的透射率．对Tauc曲线进行分析显示，薄膜的带隙随溅射功率的增大而减小．霍尔效应测试表明，薄膜的电阻率随着溅射功率的增加而降低，而载流子浓度则随着溅射功率的增加而增大．研究结果可为CdS薄膜在光电器件方面的应用提供参考．
- Abstract:
- In this paper，CdS thin film is deposited on glass and Si(111)substrates by using radiofrequency magnetron sputtering technology，and the effects of sputtering power on the structural，optical and electrical properties of the films are studied. The X-ray diffraction results show that the CdS thin films prepared under different sputtering powers are preferentially grown in the (002) direction，and their grain size and surface roughness increase with the increase of sputtering power. Transmission spectroscopy analysis shows that the CdS thin film has a large transmittance in the near-infrared region. The results of Tauc curve show that the band gap of the films decreases with the increase of sputtering power. The Hall effect test shows that the resistivity of the films decreases with the increase of sputtering power，while the carrier concentration increases with the increase of sputtering power. The research results can provide a reference for the application of CdS thin films in optoelectronic devices.
参考文献/References:
[1] PERILLO P M，RODRIGUEZ D F. Influence of low temperature annealing time on CdS thin films [J]. Physica B：Condensed Matter，2024，680：415828.
[2] TOHIDI T，YOUSEFPOUR NOVINI N，JAMSHIDI-GHALEH K. Effect of Gamma irradiation on optical characteristics of Fe-doped CdS thin films prepared using chemical bath deposition [J]. Optical Materials，2024，151：115394.
[3] LAKMAL A A I，BANDARA K M N S，SENEVIRATNE V A，et al. Medium-vacuum thermal evaporation of CdS：O thin films towards industrial CdS/CdTe solar cells：Temperature and O2% optimization [J]. Optik，2023，294：171476.
[4] SHARMA B，LALWANI R，DAS R. Nanocrystalline CdS thin films deposited by sol-gel spin coating method：Effect of aging and doping on structural，optical，and electrical properties [J]. Optik，2023，281：170831.
[5] DOROODY C，RAHMAN K S，ROSLY H N，et al. A comparative study of CdS thin films grown on ultra-thin glass substrates by RF magnetron sputtering and chemical bath deposition [J]. Materials Science in Semiconductor Processing，2021，133：105935.
[6] LUO R，LIU B，YANG X，et al. The large-area CdTe thin film for CdS/CdTe solar cell prepared by physical vapor deposition in medium pressure [J]. Applied Surface Science，2016，360：744-748.
[7] SHENG C K，AMIN K A M，HONG L L，et al. Investigation of morphological，structural and electrical properties of Cds/ PMMA nanocomposite film prepared by solution casting method [J]. International Journal of Electrochemical Science，2017，12(11)：10023-10031.
[8] TAN Y，ZHANG Z，GUO F，et al. Facile synthesis of hexagonal CdS nanofilm on FTO glass substrate via hydrothermal method [J]. International Journal of Electrochemical Science，2020，15(10)：10129-10140.
[9] SHAIKH S S，SHKIR M，MASUMDAR E U. Facile fabrication and characterization of modified spray deposited cadmium sulphide thin films [J]. Physica B：Condensed Matter，2019，571：64-70.
[10] PATTABI M，UCHIL J. Synthesis of Cadmium Sulphide nanoparticles [J]. Solar Energy Materials and Solar Cells， 2000，63(4)：309-314.
[11] TRIVEDI H，GHORANNEVIS Z，CHAUDHARY S，et al. Investigations on tailoring physical properties of RF magnetron sputtered Cadmium Sulphide thin films [J]. Materials Letters：X，2023，18：100190.
[12] DOROODY C，RAHMAN K S，ROSLY H N，et al. A comprehensive comparative study of CdTe thin films grown on ultra-thin glass substrates by close-spaced sublimation and RF magnetron sputtering [J]. Materials Letters，2021，293：129655.
[13] LISCO F，KAMINSKI P M，ABBAS A，et al. The structural properties of CdS deposited by chemical bath deposition and pulsed direct current magnetron sputtering [J]. Thin Solid Films，2015，582：323-327.
[14] YEH C-Y，LU Z W，FROYEN S，et al. Zinc-blende–urtzite polytypism in semiconductors [J]. Physical Review B， 1992，46(16)：10086-10097.
[15] 刘娟丽，吴蓉，祖一丹，等. 采用Rietveld精修，谢乐公式以及Williamson-Hall法分析不同煅烧温度TiO2的晶粒尺寸[J]. 化工管理， 2023(13)：151-155.
[16] MURUGAN R，VIJAYAPRASATH G，MAHALINGAM T，et al. Effect of rf power on the properties of magnetron sputtered CeO2 thin films [J]. Journal of Materials Science：Materials in Electronics，2015，26(5)：2800-2809.
[17] 王晓倩，基于磁控溅射技术的薄膜生长及模拟研究[D]. 天津：天津工业大学，2022：16-17.
[18] KULKARNI R，RONDIYA S，PAWBAKE A，et al. Structural and Optical Properties of CdTe thin films deposited using RF magnetron sputtering [J]. Energy Procedia，2017，110：188-195.
[19] MARASAMY L，ARUNA-DEVI R，IVáN DOMíNGUEZ ROBLEDO O，et al. Probing the significance of RF magnetron sputtering conditions on the physical properties of CdS thin films for ultra-thin CdTe photovoltaic applications [J]. Applied Surface Science，2022，574：151640.
[20] SAKTHIVEL P，MURUGAN R，ASAITHAMBI S，et al. Influence of radiofrequency power on structural， morphological，optical and electrical properties of magnetron sputtered CdO：Sm thin films as alternative TCO for optoelectronic applications [J]. Journal of Alloys and Compounds，2018，765：146-157.
[21] OLIVA A I，SOL?，X，et al. Formation of the band gap energy on CdS thin films growth by two different techniques [J]. Thin Solid Films，2001，391(1)：28-35.
[22] RAKHSHANI A E，AL-AZAB A S. Characterization of CdS films prepared by chemical-bath deposition [J]. Journal of Physics：Condensed Matter，2000，12(40)：8745.
[23] LEJMI N，SAVADOGO O. The effect of heteropolyacids and isopolyacids on the properties of chemically bath deposited CdS thin films [J]. Solar Energy Materials and Solar Cells，2001，70(1)：71-83
[24] ENR??QUEZ J P，MATHEW X. Influence of the thickness on structural，optical and electrical properties of chemical bath deposited CdS thin films [J]. Solar Energy Materials and Solar Cells，2003，76(3)：313-322
[25] KOLHE S，KULKARNI S K，TAKWALE M G，et al. The electrical conduction insprayed CdS films [J]. Solar Energy Materials，1986，13(3)：203-211.
备注/Memo
收稿日期：2024-05-01
基金项目：国家自然科学基金（51272224）；吉林省自然科学基金（20210101163JC）
第一作者：王昊民（2001—），男，本科，研究方向为功能材料物理.
通信作者：顾广瑞（1970—），男，教授，研究方向为功能材料物理.