[1]金健,栾书多,顾广瑞*.CdO - ZnO复合薄膜的光电学特性研究[J].延边大学学报(自然科学版),2021,47(02):126-130.
　JIN Jian,LUAN Shuduo,GU Guangrui*.Optical and electrical properties of CdO - ZnO composite films[J].Journal of Yanbian University,2021,47(02):126-130.
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CdO - ZnO复合薄膜的光电学特性研究

《延边大学学报(自然科学版)》[ISSN:1004-4353/CN:22-1191/N] 卷: 第47卷 期数: 2021年02期 页码: 126-130 栏目: 基础科学研究 出版日期: 2021-07-20
Title:
Optical and electrical properties of CdO - ZnO composite films
文章编号:
1004-4353(2021)02-0126-05
作者:
金健;  栾书多;  顾广瑞*
(延边大学 理学院, 吉林 延吉 133002)
Author(s):
JIN Jian;  LUAN Shuduo;  GU Guangrui*
(College of Science, Yanbian University, Yanji 133002, China)
关键词:
CdO - ZnO复合薄膜;  磁控溅射;  掺杂;  光学性能;  电学性能
Keywords:
CdO - ZnO composite films;  magnetron sputtering;  doping;  optical properties;  electrical properties
分类号:
O484.4
文献标志码:
A
摘要:
采用磁控溅射技术制备了不同原子百分比的CdO - ZnO复合薄膜,并利用X射线衍射仪、扫描电子显微镜、紫外可见近红外分光光度计、四探针电阻测试仪研究了薄膜的结构和光电学特性.研究表明:适量增加CdO掺杂量可提高薄膜在近红外区域的透射率; CdO - ZnO复合薄膜的光学带隙和电阻率随CdO含量的增加而减小,且当CdO和ZnO的原子百分比为4:1时薄膜的带隙和电阻率分别为2.09 eV和10.79×10-3 Ω·cm.该研究结果可为制备高导电性和高透过率的薄膜提供参考.
Abstract:
Using radio frequency(RF)magnetron sputtering technology, CdO - ZnO composite films were prepared with different atomic percentages. The influences of different atomic percentages on structural, morphological and optical properties of CdO - ZnO composite films were discussed in detail by X - ray diffraction. The structure and photoelectric properties of the film was investigated scanning electron microscopy and ultraviolet visible near - infrared spectrophotometer, respectively. The results show that increasing the amount of CdO doping appropriately can increase the transmittance of the film in the near - infrared region; the optical band gap value of CdO - ZnO composite film decreases with the increase of the CdO content, and when the atomic percentage of CdO and ZnO is 4:1, the band gap and resistivity of the film are 2.09 eV and 10.79×10-3 Ω·cm, respectively. The research results can provide reference for the preparation of high conductivity and high transmittance films.

参考文献/References:

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备注/Memo

收稿日期: 2021-01-07 基金项目: 国家自然科学基金(51272224)
*通信作者: 顾广瑞(1970—),男,博士,教授,研究方向为功能材料物理.

更新日期/Last Update: 2021-07-20